DocumentCode :
2097394
Title :
Direct characterization of ZnO films in composite resonators by the resonance spectrum method
Author :
Zhang, Y. ; Wang, Z. ; Cheeke, J.D.N. ; Hickernell, F.S.
Author_Institution :
Dept. of Phys., Concordia Univ., Montreal, Que., Canada
Volume :
2
fYear :
1999
fDate :
1999
Firstpage :
991
Abstract :
A direct method to characterize a piezoelectric film has been developed. Based on the measured resonance spectrum of a composite resonator, the electromechanical coupling coefficient kt2, density and elastic constant C33 D of the piezoelectric film can be derived. Good agreement with experiment was obtained
Keywords :
II-VI semiconductors; crystal resonators; density; elastic constants; piezoelectric semiconductors; piezoelectric thin films; semiconductor thin films; zinc compounds; ZnO; composite resonator; density; elastic constant; electromechanical coupling coefficient; piezoelectric film; resonance spectrum; Acoustic measurements; Artificial intelligence; Electrodes; Impedance; Physics; Piezoelectric films; Resonance; Resonant frequency; Substrates; Zinc oxide;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 1999. Proceedings. 1999 IEEE
Conference_Location :
Caesars Tahoe, NV
ISSN :
1051-0117
Print_ISBN :
0-7803-5722-1
Type :
conf
DOI :
10.1109/ULTSYM.1999.849158
Filename :
849158
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2097394
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