Title :
Selective area PZT-preparation by sol-gel method
Author :
Omori, Tatsuya ; Makita, Hirofumi ; Takamatsu, Mutsumi ; Hashimoto, Ken-Ya ; Yamaguchi, Masatsune
Author_Institution :
Dept. of Electron. & Mech. Eng., Chiba Univ., Japan
Abstract :
This paper describes selective area PZT-preparation based on PZT precursor etching for sol-gel method, and its application to the fabrication of PZT disk transducers of nearly 1 μm thickness without repeating any process. Using this method, we show that PZT disk transducers of 0.8 μm thickness can be fabricated only by a single process. The piezoelectricity of the transducers is discussed by an ultrasonic pulse echo method
Keywords :
lead compounds; piezoceramics; piezoelectric thin films; piezoelectric transducers; sol-gel processing; 0.8 mum; PZT; PbZrO3TiO3; disk transducers; piezoelectricity; precursor etching; selective area preparation; sol-gel method; ultrasonic pulse echo; Acoustic transducers; Buffer layers; Coatings; Etching; Fabrication; Piezoelectric films; Piezoelectric transducers; Solvents; Substrates; Ultrasonic transducers;
Conference_Titel :
Ultrasonics Symposium, 1999. Proceedings. 1999 IEEE
Conference_Location :
Caesars Tahoe, NV
Print_ISBN :
0-7803-5722-1
DOI :
10.1109/ULTSYM.1999.849159
