Title :
Self-reciprocal calibration of micromachined capacitance transducers in air
Author :
Sun, Liping ; Schindel, David ; Sayer, Michael
Author_Institution :
Dept. of Phys., Queen´´s Univ., Kingston, Ont., Canada
Abstract :
A one-transducer self-reciprocal calibration method has been applied to a micromachined capacitance transducer in air over the frequency range 100 kHz~700 kHz. The corrections for air attenuation and transducer diffraction effects at different frequencies are included in this extended reciprocal calibration technique. The measured receive sensitivities are validated by comparing with results obtained using a three-transducer calibration method. The self-calibration results are also validated by comparing with predictions from a theoretical model for the test transducer
Keywords :
calibration; capacitive sensors; micromachining; ultrasonic transducers; 100 to 700 kHz; air attenuation; air-coupled ultrasonic transducer; diffraction effects; micromachined capacitance transducer; one-transducer self-reciprocal calibration; sensitivity; Acoustic measurements; Acoustic transducers; Biomedical transducers; Calibration; Capacitance; Diffraction; Frequency; Transmitters; Ultrasonic transducers; Ultrasonic variables measurement;
Conference_Titel :
Ultrasonics Symposium, 1999. Proceedings. 1999 IEEE
Conference_Location :
Caesars Tahoe, NV
Print_ISBN :
0-7803-5722-1
DOI :
10.1109/ULTSYM.1999.849198
