DocumentCode
2098259
Title
3D simulation of controlled micromachined capacitive ultrasound transducers
Author
Kaltenbacher, Manfred ; Landes, H. ; Niederer, K. ; Lerch, R.
Author_Institution
Dept. of Sensor Technol., Erlangen-Nurnberg Univ., Germany
Volume
2
fYear
1999
fDate
1999
Firstpage
1155
Abstract
A finite element simulation scheme which allows the efficient calculation of electrostatic transducers immersed in an acoustic fluid is presented. This calculation scheme has been applied in investigations of the dynamical behavior of surface micromachined capacitive ultrasound arrays. In order to improve dynamics and efficiency of such transducers a controller has been designed and tested. Therewith, ring down time and acoustic crosstalk in the array are reduced
Keywords
capacitive sensors; finite element analysis; micromachining; ultrasonic transducer arrays; 3D finite element simulation; acoustic crosstalk; acoustic fluid; capacitive ultrasound transducer array; controller; electrostatic transducer; ring down time; surface micromachining; Acoustic arrays; Acoustic testing; Acoustic transducers; Crosstalk; Electrostatics; Finite element methods; Fluid dynamics; Ultrasonic imaging; Ultrasonic transducer arrays; Ultrasonic transducers;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 1999. Proceedings. 1999 IEEE
Conference_Location
Caesars Tahoe, NV
ISSN
1051-0117
Print_ISBN
0-7803-5722-1
Type
conf
DOI
10.1109/ULTSYM.1999.849202
Filename
849202
Link To Document