DocumentCode
2098283
Title
New results on miniaturised annular arrays built using ultrasound micromachining
Author
Ballandras, S. ; Maître, P. ; Guine, P. ; Bourriot, N. ; Steichen, W. ; Piranda, B. ; Gelly, J.F.
Author_Institution
Lab. de Phys. et Metrol. des Oscillateurs Assoc., Univ. de Franche-Comte, Besancon, France
Volume
2
fYear
1999
fDate
1999
Firstpage
1159
Abstract
Fabrication and test of a 2 mm diameter 4 channel annular array is described. Comparison between experimentally measured and theoretically predicted admittance of the transducer elements is reported. The theoretical 3D finite element analysis is finally used to identify the electrically measured vibration mode of the device
Keywords
finite element analysis; micromachining; ultrasonic transducer arrays; 2 mm; 3D finite element analysis; admittance; annular array; fabrication; micromachining; ultrasound transducer; vibration mode; Admittance measurement; Electric variables measurement; Fabrication; Finite element methods; Testing; Ultrasonic imaging; Ultrasonic transducer arrays; Ultrasonic transducers; Ultrasonic variables measurement; Vibration measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 1999. Proceedings. 1999 IEEE
Conference_Location
Caesars Tahoe, NV
ISSN
1051-0117
Print_ISBN
0-7803-5722-1
Type
conf
DOI
10.1109/ULTSYM.1999.849203
Filename
849203
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