Title :
Fabrication and improvement of polysilicon microdynamic gear wheels system
Author :
Avram, Fiz M. ; Neagoe, Ing O. ; Simion, Fiz M.
Author_Institution :
I.C.C.E., Bucharest, Romania
Abstract :
The purpose of this research was to design and fabricate a microdynamic system of three polysilicon gear wheels, using a three masks process for silicon microfabrication. The fabrication sequence of the micromechanical system is following the process described by Fan(1988) for micromachining detachable moving parts on silicon substrates. The basis for fabricating of movable parts is the use of sacrificial layers that act as spacers and they also keep the parts attached to the wafer during fabrication
Keywords :
chemical vapour deposition; elemental semiconductors; micromachining; micromechanical devices; silicon; substrates; 170 mum; 200 mum; 250 mum; LPCVD; Si; Si microfabrication; Si substrates; fabrication; masks; microdynamic system; micromechanical system; polysilicon gear wheels; polysilicon microdynamic gear wheel; sacrificial layers; spacers; Annealing; Axles; Electrons; Fabrication; Gears; Insulators; Silicon; Stress; Substrates; Wheels;
Conference_Titel :
Semiconductor Conference, 1996., International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-3223-7
DOI :
10.1109/SMICND.1996.557310
