Title :
MEMS Fabry-Pérot Pixels
Author :
Toshiyoshi, Hiroshi ; Lo, Chengyao ; Taii, Yusuke ; Fujita, Hiroyuki
Author_Institution :
Institute of Industrial Science, The University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, JAPAN. E-mail. hiro@iis.u-tokyo.ac.jp, Tel. +81-3-54526276, Fax. +81-3-54526250
Abstract :
Novel Coulomb force controlled color display pixels of tunable MEMS (Micro Electro Mechanical System) Fabry-Pérot interferometer structure on flexible PEN (polyethylene naphthalate) substrate have been demonstrated with optical, electrical, and mechanical characteristics.
Keywords :
Displays; Electrodes; Force control; Mechanical systems; Micromechanical devices; Nonhomogeneous media; Optical filters; Optical interferometry; Polyethylene; Voltage;
Conference_Titel :
Lasers and Electro-Optics Society, 2007. LEOS 2007. The 20th Annual Meeting of the IEEE
Conference_Location :
Lake Buena Vista, FL, USA
Print_ISBN :
978-1-4244-0925-9
Electronic_ISBN :
1092-8081
DOI :
10.1109/LEOS.2007.4382388
