Power Quality Analysis of a Sensitive Load Using a Phasor Measurement Unit

This paper discusses the set up and analyses of Power Quality using a Phasor Measurement Unit (PMU) located at a Semiconductor Foundry Fabrication Facility (sensitive load). The paper demonstrates the setting up of an SEL 421 PMU at the Facility (software and hardware), data archiving and real time waveform capture of voltages, currents and frequency. A code was developed for filtering the data collected from the PMU in MATLAB. A GUI was developed in MATLAB. The GUI analyses the data from the PMU and highlights aberrations in the values of Voltages and Frequency from the Power Quality limits for sensitive loads. The paper evaluates a unique method for analysis of Power Quality before the installation of a wind turbine directly feeding the Facility so as to set a standard after the wind turbine is installed.