Title :
Photoresponse of Ã\x9f-FeSi2 precipitates in a silicon waveguide
Author :
Sun, C.M. ; Chan, P.S. ; Tsang, H.K.
Author_Institution :
Chinese Univ. of Hong Kong, Shatin
Abstract :
beta-FeSi2 precipitates, with a band gap of ~0.8 eV, are formed by ion implantation into a silicon-on-insulator rib waveguide. A linear photocurrent of 1 muA was obtained from a p+-i-n+ structure under 3.16 mW incident power at 1550 nm.
Keywords :
elemental semiconductors; iron compounds; optical waveguides; photoconductivity; silicon; Si; linear photocurrent; photoresponse; precipitates; silicon waveguide; Annealing; Iron; Optical waveguides; P-n junctions; Photoconductivity; Photodetectors; Photonic band gap; Silicon; Temperature; Waveguide discontinuities;
Conference_Titel :
Lasers and Electro-Optics Society, 2007. LEOS 2007. The 20th Annual Meeting of the IEEE
Conference_Location :
Lake Buena Vista, FL
Print_ISBN :
978-1-4244-0925-9
Electronic_ISBN :
1092-8081
DOI :
10.1109/LEOS.2007.4382443