Transverse plate mode resonators exhibiting very high quality factors and small insertion losses

In this paper, the use of transverse waves on thin quartz plates (AT cut, propagation along Z´) for the fabrication of high quality resonators is proposed. A combination of grooves and strips is implemented on one side of the plate to excite and trap shear horizontal wave. It is shown that optimal obstacle height occurs for the different modes guided by the structure. Insertion losses as small as -3,5 dB and Q factors times frequency product equal to 1,3.10¹³ are found experimentally.