• DocumentCode
    2101624
  • Title

    Transverse plate mode resonators exhibiting very high quality factors and small insertion losses

  • Author

    Briot, J.B. ; Ballandras, S.

  • Author_Institution
    Lab. de Phys. et Metrol. des Oscillateurs, Univ. de Franche-Comte, Besancon, France
  • Volume
    1
  • fYear
    1999
  • fDate
    17-20 Oct. 1999
  • Firstpage
    7
  • Abstract
    In this paper, the use of transverse waves on thin quartz plates (AT cut, propagation along Z´) for the fabrication of high quality resonators is proposed. A combination of grooves and strips is implemented on one side of the plate to excite and trap shear horizontal wave. It is shown that optimal obstacle height occurs for the different modes guided by the structure. Insertion losses as small as -3,5 dB and Q factors times frequency product equal to 1,3.1013 are found experimentally.
  • Keywords
    Q-factor; crystal resonators; quartz; -3.5 dB; AT-cut quartz; SiO2; insertion loss; quality factor; shear horizontal wave; transverse plate mode resonator; Aluminum; Electrodes; Fabrication; Gratings; Insertion loss; Q factor; Resonance; Resonant frequency; Strips; Testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 1999. Proceedings. 1999 IEEE
  • Conference_Location
    Caesars Tahoe, NV
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-5722-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.1999.849345
  • Filename
    849345
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2101624