Title :
A mixed FEM/BEM model to characterize surface waves on multilayer substrate
Author :
Camou, S. ; Ballandras, S. ; Pastureaud, T.
Author_Institution :
Lab. de Phys. et Metrol. des Oscillateurs, Univ. de Franche-Comte, Besancon, France
Abstract :
Propagation of elastic waves in piezoelectric films deposited on a given substrate is addressed in this paper. Realistic boundary conditions are applied using a mixed FEM/BEM representation of the problem. Data are extracted from this calculation to compute a elementary P-matrix, allowing to estimate theoretically the electrical response of a given transducer deposited on such substrates.
Keywords :
boundary-elements methods; finite element analysis; multilayers; piezoelectric thin films; surface acoustic waves; P-matrix; SAW transducer; elastic wave propagation; electrical response; mixed FEM/BEM model; multilayer substrate; piezoelectric film; surface acoustic wave; Admittance; Boundary conditions; Chebyshev approximation; Computational modeling; Nonhomogeneous media; Poisson equations; Silicon; Stress; Surface waves; Transducers;
Conference_Titel :
Ultrasonics Symposium, 1999. Proceedings. 1999 IEEE
Conference_Location :
Caesars Tahoe, NV
Print_ISBN :
0-7803-5722-1
DOI :
10.1109/ULTSYM.1999.849372
