Phonon Polariton Reflectance Spectra In a Silicon Carbide Membrane Hole Array

We report on the experimental observation of the effect of periodic hole arrays in the infrared reflection spectra of suspended polycrystalline silicon carbide (poly-SiC) membranes. The poly-SiC was deposited by low pressure chemical vapor deposition (LPCVD), patterned with contact photolithography, and etched by reactive ion etching (RIE). The spectra are shown to be strongly dependent on the pitch and aperture size of the hole arrays, indicating poly-SiC has promise as a mid-IR optical material.