Title :
Investigation of longitudinal leaky surface acoustic waves by scanning acoustic force microscopy
Author :
Behme, G. ; Chilla, E. ; Frohlich, H.-J.
Author_Institution :
Paul Drude Inst. for Solid State Electron., Berlin, Germany
Abstract :
We present first measurements on acoustic waves with quasi longitudinal polarization on quartz and lithium tantalate substrates as well as layered systems carried out by a scanning acoustic force microscope (SAFM). Acoustic phase velocities were measured for microscopic areas showing a good agreement with numerical calculations. The influence of the penetration depth of the high velocity pseudo SAWs (HVPSAW) on the SAFM signal formation is discussed.
Keywords :
acoustic microscopy; lithium compounds; quartz; surface acoustic waves; LiTaO3; SiO2; acoustic phase velocity; high velocity pseudo SAW; layered system; lithium tantalate substrate; longitudinal leaky surface acoustic wave; penetration depth; quartz substrate; quasi-longitudinal polarization; scanning acoustic force microscopy; Acoustic measurements; Acoustic waves; Area measurement; Force measurement; Lithium compounds; Microscopy; Phase measurement; Polarization; Surface acoustic waves; Velocity measurement;
Conference_Titel :
Ultrasonics Symposium, 1999. Proceedings. 1999 IEEE
Conference_Location :
Caesars Tahoe, NV
Print_ISBN :
0-7803-5722-1
DOI :
10.1109/ULTSYM.1999.849379
