• DocumentCode
    2102376
  • Title

    Investigation of longitudinal leaky surface acoustic waves by scanning acoustic force microscopy

  • Author

    Behme, G. ; Chilla, E. ; Frohlich, H.-J.

  • Author_Institution
    Paul Drude Inst. for Solid State Electron., Berlin, Germany
  • Volume
    1
  • fYear
    1999
  • fDate
    17-20 Oct. 1999
  • Firstpage
    173
  • Abstract
    We present first measurements on acoustic waves with quasi longitudinal polarization on quartz and lithium tantalate substrates as well as layered systems carried out by a scanning acoustic force microscope (SAFM). Acoustic phase velocities were measured for microscopic areas showing a good agreement with numerical calculations. The influence of the penetration depth of the high velocity pseudo SAWs (HVPSAW) on the SAFM signal formation is discussed.
  • Keywords
    acoustic microscopy; lithium compounds; quartz; surface acoustic waves; LiTaO3; SiO2; acoustic phase velocity; high velocity pseudo SAW; layered system; lithium tantalate substrate; longitudinal leaky surface acoustic wave; penetration depth; quartz substrate; quasi-longitudinal polarization; scanning acoustic force microscopy; Acoustic measurements; Acoustic waves; Area measurement; Force measurement; Lithium compounds; Microscopy; Phase measurement; Polarization; Surface acoustic waves; Velocity measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 1999. Proceedings. 1999 IEEE
  • Conference_Location
    Caesars Tahoe, NV
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-5722-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.1999.849379
  • Filename
    849379
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2102376