Title :
Electrical properties of p- and n-type silicon nanowires
Author :
Wang, Yabfeng ; Cabassi, Marco ; Ho, Tsung-ta ; Lew, Kok-Keong ; Redwing, Joan ; Mayer, Theresa
Author_Institution :
Dept. of Electr. Eng., Pennsylvania State Univ., University Park, PA, USA
Abstract :
There has been considerable interest in bottom-up integration of semiconductor nanowires for their application in future logic, memory, and sensor circuits. The ability to integrate field effect devices with p- and n-type conduction channels is a challenge that must be overcome to fabricate complementary logic circuits using such technologies. In this talk, we present the results of four-point resistivity and gate-dependent conductance measurements taken on unintentionally-doped, p-type, and n-type silicon nanowires (SiNWs). These results emphasize that future efforts must address the source of the high p-type background doping concentration in vapor-liquid-solid grown SiNWs to facilitate improvements in the properties of n-channel devices.
Keywords :
doping profiles; electric admittance; electrical resistivity; elemental semiconductors; nanowires; silicon; Si; background doping concentration; complementary logic circuits; field effect device conduction channels; four-point resistivity measurements; gate-dependent conductance measurements; n-type silicon nanowires; nanowire electrical properties; p-type silicon nanowires; semiconductor nanowires; unintentionaly-doped nanowires; vapor-liquid-solid grown SiNW; Conductivity; Doping; Electrical resistance measurement; Electrodes; Intrusion detection; Logic circuits; Nanowires; Silicon; Testing; Voltage;
Conference_Titel :
Device Research Conference, 2004. 62nd DRC. Conference Digest [Includes 'Late News Papers' volume]
Print_ISBN :
0-7803-8284-6
DOI :
10.1109/DRC.2004.1367764