Title :
Experimental and theoretical analysis of SAW properties of the langasite substrate with Euler angle (0/spl deg/,140/spl deg/,/spl phi/)
Author :
Bungo, A. ; Jian, C. ; Yamaguchi, Kazuhiro ; Sawada, Yasuharu ; Kimura, Ryuji ; Uda, S.
Author_Institution :
Microelectron. Labs., Mitsubishi Mater. Corp., Saitama, Japan
Abstract :
The numerical calculations using new material constants were in good agreement with the experimental results of the temperature-related SAW properties on the langasite substrate with Euler angle (0°,140°,φ). The temperature-related SAW properties as a function of the IDT metal thickness were also experimentally investigated. It was revealed that a thicker metal leads to a lower turnover temperature. Furthermore we investigated the NSPUDT (natural single phase unidirectional transducer) properties of langasite with Euler angle (0°,140°,25°) experimentally. Its directivity was almost equal to one estimated by the calculation based on the coupling of mode (COM) model. This NSPUDT property is a promising feature for the low-loss IF filter.
Keywords :
elastic constants; interdigital transducers; substrates; surface acoustic waves; ultrasonics; Euler angle; IDT metal thickness dependence; NSPUDT properties; SAW properties; coupling of mode model; directivity; experimental results; langasite substrate; low-loss IF filter; material constants; natural single phase unidirectional transducer; numerical calculations; temperature-related SAW; turnover temperature; ultrasonics; Electrodes; Frequency measurement; Laboratories; Least squares methods; Materials reliability; Microelectronics; Surface acoustic waves; Temperature distribution; Temperature measurement; Ultrasonic variables measurement;
Conference_Titel :
Ultrasonics Symposium, 1999. Proceedings. 1999 IEEE
Conference_Location :
Caesars Tahoe, NV
Print_ISBN :
0-7803-5722-1
DOI :
10.1109/ULTSYM.1999.849392