Integrative technology-based approach of microelectromechanical systems (MEMS) for biosensing applications

In this work we simultaneously aim at addressing the design and fabrication of microelectromechanical systems (MEMS) for biological applications bearing actuation and readout capabilities together with adapted tools dedicated to surface functionalization at the microscale. The biosensing platform is based on arrays of silicon micromembranes with piezoelectric actuation and piezoresistive read-out capabilities. The detection of the cytochrome C protein using molecularly imprinted polymers (MIPs) as functional layer is demonstrated. The adapted functionalization tool specifically developed to match the micromembranes´ platform is an array of silicon cantilevers incorporating precise force sensors for the trim and force measurements during deposition of biological materials onto the sensors´ active area. In either case, associated analog electronics is specifically realized to deal with specific signals treatment fed through the MEMS-based devices.