DocumentCode
2102924
Title
4H-SiC PIN Recessed Window Avalanche Photodiode
Author
Liu, Han-Din ; Mcintosh, Dion ; Bai, Xiaogang ; Pan, Huapu ; Liu, Mingguo ; Campbell, Joe C.
Author_Institution
Univ. of Virginia, Charlottesville
fYear
2007
fDate
21-25 Oct. 2007
Firstpage
517
Lastpage
518
Abstract
We report 4H-SiC p-i-n recessed window avalanche photodiodes with low dark current and high quantum efficiency. For a circular device of 250 mum diameter, the device demonstrated a responsivity of ~135.5 mW/A (external quantum efficiency = ~64%), a dark current ~90 pA (~0.183 mum/cm2) at a photocurrent gain of 1000, and an excess noise factor k of slightly less than 0.1.
Keywords
avalanche photodiodes; silicon compounds; wide band gap semiconductors; PIN recessed window avalanche photodiode; photocurrent; Avalanche photodiodes; Biomedical optical imaging; Coatings; Dark current; Optical noise; Passivation; Photoconductivity; Photonic band gap; Quantum computing; Silicon carbide;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics Society, 2007. LEOS 2007. The 20th Annual Meeting of the IEEE
Conference_Location
Lake Buena Vista, FL
ISSN
1092-8081
Print_ISBN
978-1-4244-0925-9
Electronic_ISBN
1092-8081
Type
conf
DOI
10.1109/LEOS.2007.4382507
Filename
4382507
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