DocumentCode
2103038
Title
10 GHz narrow band SAW filters using diamond
Author
Hachigo, A. ; Nakahata, H. ; Itakura, K. ; Fujii, Shohei ; Shikata, Shin-Ichi
Author_Institution
Res. Labs., Sumitomo Electr. Ind. Ltd., Itami, Japan
Volume
1
fYear
1999
fDate
17-20 Oct. 1999
Firstpage
325
Abstract
Harmonic phenomena for the layered structures have been discussed and show several differences from those for bulk substrates. An equivalent circuit model for the harmonics including velocity dispersion has been presented and compared with experiments. SAW filters up to 10 GHz have been fabricated over one micron line width using the ZnO/diamond structure.
Keywords
II-VI semiconductors; diamond; equivalent circuits; surface acoustic wave filters; zinc compounds; 10 GHz; C; ZnO-C; diamond; equivalent circuit; layered structures; narrow band SAW filters; velocity dispersion; Commercialization; Dispersion; Equivalent circuits; Frequency; Laboratories; Metallization; Narrowband; Power harmonic filters; SAW filters; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium, 1999. Proceedings. 1999 IEEE
Conference_Location
Caesars Tahoe, NV
ISSN
1051-0117
Print_ISBN
0-7803-5722-1
Type
conf
DOI
10.1109/ULTSYM.1999.849412
Filename
849412
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