DocumentCode
2103180
Title
Conductive copper patterning by nanotransfer printing
Author
Felmet, Kimberly ; Sun, Yangming ; Loo, Yueh-Lin
Author_Institution
Dept. of Chem. Eng., Texas Univ., Austin, TX, USA
fYear
2004
fDate
21-23 June 2004
Firstpage
91
Abstract
In this paper, we report a solventless, additive approach for patterning conductive copper in the 1-100 μm range at ambient conditions. A freshly-etched GaAs substrate is treated with 1,8-octanedithiol molecules, resulting in covalent bonds between the GaAs substrate and one of the thiol functionalities. A poly(dimethylsiloxane), PDMS, elastomeric stamp, freshly evaporated with Cu, is then brought into contact with the substrate. Intimate molecular contact between the raised regions of the stamp and the substrate facilitates the permanent attachment of Cu to the GaAs substrate via the formation of covalent bonds between the unreacted thiol endgroups of octanedithiol and Cu. Pattern transfer is completed upon stamp removal; this process occurs at ambient conditions with less than 30 seconds of contact time. Currently, this technique permits large-area patterning of features with sizes ranging from 1 μm to 500 μm.
Keywords
bonds (chemical); copper; metallisation; nanopatterning; organic compounds; 1 to 500 micron; 1,8-octanedithiol; Cu-GaAs; PDMS; ambient conditions; conductive copper patterning; covalent bonds; elastomeric stamp; feature size; large-area patterning; molecular contact; nanotransfer printing; pattern transfer; poly(dimethylsiloxane); solventless additive patterning method; thiol functionalities; Chemical engineering; Copper; Gallium arsenide; Gold; Pattern analysis; Printing; Silicon; Sun; Surface contamination; Surface morphology;
fLanguage
English
Publisher
ieee
Conference_Titel
Device Research Conference, 2004. 62nd DRC. Conference Digest [Includes 'Late News Papers' volume]
ISSN
1548-3770
Print_ISBN
0-7803-8284-6
Type
conf
DOI
10.1109/DRC.2004.1367798
Filename
1367798
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