• DocumentCode
    2103334
  • Title

    Polar heterostructure for multi-function devices: theoretical studies

  • Author

    Wu, Yuh-Renn ; Singh, Jasprit

  • Author_Institution
    Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA
  • fYear
    2004
  • fDate
    21-23 June 2004
  • Firstpage
    103
  • Abstract
    It is well known that polar oxides such as BaTiO3 and LiNbO3 have extremely large piezoelectric and pyroelectric effects which make them highly suitable for sensor application. Semiconductors on the other hand have poor piezoelectric and pyroelectric effects but have their abilities to show large change in conductivity with small bias. In this paper we examine the potential of devices based on heterostructures made from highly polar materials and semiconductors. Such functional devices have superior sensor properties as well as transistor properties. The basis device examined is based on the use of a thin oxide with high piezoelectric coefficients or pyroelectric coefficients under the gate region. Channel charge and current are directly controlled by gate voltage (normal FET), temperature (thermal sensor), or stress (stress sensor). We examine the performance of three classes of heterostructures that form the basis of important semiconductor technologies: (i) Si/SiO2/BaTiO3 heterostructure junctions that would be an important breakthrough for silicon sensor technology; (ii) GaN/AlN/BaTiO3 heterostructure junctions that would be important especially in high temperature sensor application; and (iii) GaAs/AlGaAs/BaTiO3 heterostructure field effect transistors.
  • Keywords
    III-V semiconductors; aluminium compounds; barium compounds; dielectric polarisation; dielectric thin films; electric sensing devices; elemental semiconductors; field effect transistors; gallium arsenide; gallium compounds; piezoelectric devices; pyroelectric devices; semiconductor heterojunctions; silicon; silicon compounds; stress measurement; temperature sensors; BaTiO3 polar oxides; FET; GaAs-AlGaAs-BaTiO3; GaAs/AlGaAs/BaTiO3 heterostructure field effect transistors; GaN-AlN-BaTiO3; GaN/AlN/BaTiO3 heterostructure junctions; LiNbO3 polar oxides; Si-SiO2-BaTiO3; Si/SiO2/BaTiO3 heterostructure junctions; channel charge; channel current; gate voltage; high temperature sensor application; highly polar materials; multi-function devices; piezoelectric effects; polar heterostructure; pyroelectric effects; semiconductor conductivity; sensor application; sensor properties; silicon sensor technology; stress sensor; thermal sensor; Conducting materials; Conductivity; Pyroelectricity; Semiconductor materials; Stress control; Temperature control; Temperature sensors; Thermal sensors; Thermal stresses; Voltage control;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Device Research Conference, 2004. 62nd DRC. Conference Digest [Includes 'Late News Papers' volume]
  • ISSN
    1548-3770
  • Print_ISBN
    0-7803-8284-6
  • Type

    conf

  • DOI
    10.1109/DRC.2004.1367804
  • Filename
    1367804