SAW impedance element filters for 5 GHz and beyond

Author

Lehtonen, S. ; Plessky, Victor P. ; Honkanen, M.T. ; Ovchinnikov, Valery ; Turunen, Jari ; Salomaa, M.M.

Author_Institution

Mater. Phys. Lab., Helsinki Univ. of Technol., Finland

Volume

1

fYear

1999

fDate

17-20 Oct. 1999

Firstpage

395

Abstract

New surface acoustic wave (SAW) impedance element filters operating in the 5 GHz range are designed, fabricated and characterized and preliminary results for devices operating in the 7.5-10 GHz regime are reported. The patterning is carried out using direct-writing electron-beam lithography and the lift-off technique. In parallel, reactive ion etching (RIE) experiments are attempted. For our 5 GHz filter having a -3 dB bandwidth of about 155 MHz, a minimum insertion loss of 3.0 dB and a ripple on the order of 0.5 dB in a 100 MHz passband are measured. For our first prototype 7.5 GHz filter, an insertion loss of 7.1 dB is obtained.

Keywords

acoustic impedance; acoustic microwave devices; electron beam lithography; microwave filters; sputter etching; surface acoustic wave filters; 155 MHz; 3.0 dB; 5 to 10 GHz; 7.1 dB; SHF band; direct writing electron beam lithography; fabrication; insertion loss; lift-off technique; reactive ion etching; surface acoustic wave impedance element filter; Acoustic waves; Band pass filters; Bandwidth; Etching; Insertion loss; Lithography; Passband; Surface acoustic wave devices; Surface acoustic waves; Surface impedance;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1999. Proceedings. 1999 IEEE

Conference_Location

Caesars Tahoe, NV

ISSN

1051-0117

Print_ISBN

0-7803-5722-1

Type

conf

DOI

10.1109/ULTSYM.1999.849427

Filename

849427