Title :
Liquid sensing system based on two port SH-SAW resonator
Author :
Nomura, Tadahiro ; Saitoh, A. ; Horikoshi, Y. ; Furukawa, S.
Author_Institution :
Shibaura Inst. of Technol., Tokyo, Japan
Abstract :
A new liquid flow sensing system constructed with SH-SAW resonator was used to characterize liquid properties. Surface acoustic waves with the shear horizontal displacement (SH-SAW) have been used for sensing the properties in liquid phase. The SH-SAW resonator having two port was fabricated on a 36° rotated Y cut X prop. LiTaO3 (36YX LiTaO3) substrate. The flow of a sample liquid was precisely controlled by a liquid chromatography system. The transient responses were detected as sensor response by the two-port SAW resonator. The results showed a specific feature and are used to determine the liquid properties.
Keywords :
chemical sensors; lithium compounds; surface acoustic wave delay lines; surface acoustic wave resonators; surface acoustic wave sensors; transient response; IDT; LiTaO3; aqueous solutions; chemical sensing; delay line; flow injection system; ion discrimination; liquid chromatography; liquid flow sensing system; narrow bandwidth; shear horizontal displacement SAW; transient responses; two port SH-SAW resonator; Acoustic sensors; Acoustic waves; Control systems; Delay lines; Fluid flow; Frequency; Mechanical sensors; Oscillators; Surface acoustic waves; Surface waves;
Conference_Titel :
Ultrasonics Symposium, 1999. Proceedings. 1999 IEEE
Conference_Location :
Caesars Tahoe, NV
Print_ISBN :
0-7803-5722-1
DOI :
10.1109/ULTSYM.1999.849443
