Liquid sensing system based on two port SH-SAW resonator

Author

Nomura, Tadahiro ; Saitoh, A. ; Horikoshi, Y. ; Furukawa, S.

Author_Institution

Shibaura Inst. of Technol., Tokyo, Japan

Volume

1

fYear

1999

fDate

17-20 Oct. 1999

Firstpage

477

Abstract

A new liquid flow sensing system constructed with SH-SAW resonator was used to characterize liquid properties. Surface acoustic waves with the shear horizontal displacement (SH-SAW) have been used for sensing the properties in liquid phase. The SH-SAW resonator having two port was fabricated on a 36° rotated Y cut X prop. LiTaO₃ (36YX LiTaO₃) substrate. The flow of a sample liquid was precisely controlled by a liquid chromatography system. The transient responses were detected as sensor response by the two-port SAW resonator. The results showed a specific feature and are used to determine the liquid properties.

Keywords

chemical sensors; lithium compounds; surface acoustic wave delay lines; surface acoustic wave resonators; surface acoustic wave sensors; transient response; IDT; LiTaO₃; aqueous solutions; chemical sensing; delay line; flow injection system; ion discrimination; liquid chromatography; liquid flow sensing system; narrow bandwidth; shear horizontal displacement SAW; transient responses; two port SH-SAW resonator; Acoustic sensors; Acoustic waves; Control systems; Delay lines; Fluid flow; Frequency; Mechanical sensors; Oscillators; Surface acoustic waves; Surface waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1999. Proceedings. 1999 IEEE

Conference_Location

Caesars Tahoe, NV

ISSN

1051-0117

Print_ISBN

0-7803-5722-1

Type

conf

DOI

10.1109/ULTSYM.1999.849443

Filename

849443