CMOS-integrated flip-chip, micro-pixel InGaN LED arrays for on-chip microfluorimetry

Author

Griffin, C. ; McKendry, J. ; Zhang, H.X. ; Gu, E. ; Rae, B.R. ; Henderson, R. ; Renshaw, D. ; Girkin, J.M. ; Dawson, Martin D.

Author_Institution

Univ. of Strathclyde, Glasgow

fYear

2007

fDate

21-25 Oct. 2007

Firstpage

588

Lastpage

589

Abstract

4times16 arrays of micro-pixellated InGaN LEDs, each of diameter 72 mum, have been flip-chipped onto CMOS driver backplanes which also contain single-photon avalanche photodiodes. Pattern-programmable control is demonstrated in continuous and nanosecond modes. Such devices show promise as miniaturized excitation and detection systems for microfluorimetry studies.

Keywords

CMOS integrated circuits; III-V semiconductors; driver circuits; flip-chip devices; gallium compounds; indium compounds; integrated optics; light emitting diodes; micro-optics; photodetectors; CMOS driver backplanes; CMOS-integrated flip-chip LED arrays; InGaN; continuous modes; micro-pixel LED arrays; miniaturized detection systems; miniaturized excitation system; nanosecond modes; on-chip microfluorimetry; pattern-programmable control; single-photon avalanche photodiodes; Backplanes; Bonding; CMOS process; Fluorescence; Light emitting diodes; Optical arrays; Optical scattering; Pulse measurements; Silicon; Space vector pulse width modulation;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Society, 2007. LEOS 2007. The 20th Annual Meeting of the IEEE

Conference_Location

Lake Buena Vista, FL

ISSN

1092-8081

Print_ISBN

978-1-4244-0925-9

Electronic_ISBN

1092-8081

Type

conf

DOI

10.1109/LEOS.2007.4382543

Filename

4382543