• DocumentCode
    2103840
  • Title

    A novel angular rate sensor employing flexural plate wave

  • Author

    Chang Seung Lee ; Kwangsoo No ; Dang Moon Wee ; Jong Hyun Lee ; Chang Auck Choi

  • Author_Institution
    Dept. of Mater. Sci. & Eng., Korea Adv. Inst. of Sci. & Technol., Seoul, South Korea
  • Volume
    1
  • fYear
    1999
  • fDate
    17-20 Oct. 1999
  • Firstpage
    493
  • Abstract
    We designed and fabricated the silicon micromachined flexural plate wave actuator based on piezoelectric PbZrxTi1-xO3 (PZT) thin films for use in angular rate sensor. The working principles of the angular rate sensor utilizing the wave were investigated.
  • Keywords
    Coriolis force; angular velocity measurement; gyroscopes; micromachining; micromechanical resonators; microsensors; piezoelectric actuators; ultrasonic delay lines; Coriolis force; PZT; PbZrO3TiO3; Si; US delay line; angular rate sensor; design; fabrication; freestanding membrane; micro-gyroscope; micromachined flexural plate wave actuator; piezoelectric thin films; Acoustic sensors; Actuators; Biomembranes; Capacitive sensors; Frequency; Materials science and technology; Semiconductor thin films; Sensor phenomena and characterization; Silicon; Thin film sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 1999. Proceedings. 1999 IEEE
  • Conference_Location
    Caesars Tahoe, NV
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-5722-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.1999.849447
  • Filename
    849447
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2103840