Measurement techniques for millimeter-wave integrated antennas

Techniques for on-wafer integrated antenna measurement are presented. Two novel techniques and associated apparatuses are developed specifically for the measurement of 20-30 GHz slot antennas integrated onto GaAs wafers. Both draw upon equipment already used for non-radiating integrated circuits, i.e. a wafer-prober system, but involve significant modifications. The resulting setups are validated using a numerical EM analysis tool which shows effect of the measurement fixtures on the experimental results. Finally, some examples of measured data are given to illustrate the usefulness of the techniques