• DocumentCode
    2104751
  • Title

    Pulsed ultrasonic actuation of polysilicon surface micromachines

  • Author

    Kaajakari, V. ; Lal, Amit

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Wisconsin Univ., Madison, WI, USA
  • Volume
    1
  • fYear
    1999
  • fDate
    17-20 Oct. 1999
  • Firstpage
    643
  • Abstract
    We report on the use of ultrasonic pulses for actuation of surface micromachined devices. The pulses were generated by an attached piezoelectric PZT plate making the method suitable for IC-packaged structures. In this paper we investigate the effect of different parameters on the actuation: pulse width and amplitude, ambient pressure and size of the micromachines. Applications for the pulse actuation method include assembly and release of stuck micromachines.
  • Keywords
    elemental semiconductors; microactuators; silicon; ultrasonic applications; IC package; PZT; PZT piezoelectric plate; PbZrO3TiO3; Si; polysilicon surface micromachine; pulsed ultrasonic actuation; Assembly; Coils; Drag; Electrostatic actuators; Fabrication; Packaging; Pulse generation; Shape; Silicon; Space vector pulse width modulation;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 1999. Proceedings. 1999 IEEE
  • Conference_Location
    Caesars Tahoe, NV
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-5722-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.1999.849481
  • Filename
    849481
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2104751