Title :
Pulsed ultrasonic actuation of polysilicon surface micromachines
Author :
Kaajakari, V. ; Lal, Amit
Author_Institution :
Dept. of Electr. & Comput. Eng., Wisconsin Univ., Madison, WI, USA
Abstract :
We report on the use of ultrasonic pulses for actuation of surface micromachined devices. The pulses were generated by an attached piezoelectric PZT plate making the method suitable for IC-packaged structures. In this paper we investigate the effect of different parameters on the actuation: pulse width and amplitude, ambient pressure and size of the micromachines. Applications for the pulse actuation method include assembly and release of stuck micromachines.
Keywords :
elemental semiconductors; microactuators; silicon; ultrasonic applications; IC package; PZT; PZT piezoelectric plate; PbZrO3TiO3; Si; polysilicon surface micromachine; pulsed ultrasonic actuation; Assembly; Coils; Drag; Electrostatic actuators; Fabrication; Packaging; Pulse generation; Shape; Silicon; Space vector pulse width modulation;
Conference_Titel :
Ultrasonics Symposium, 1999. Proceedings. 1999 IEEE
Conference_Location :
Caesars Tahoe, NV
Print_ISBN :
0-7803-5722-1
DOI :
10.1109/ULTSYM.1999.849481
