The trial fabrication and characteristics of linear ultrasonic motor for application to X-Y table

This paper describes the trial fabrication of linear ultrasonic motor for the purpose of X-Y Table application. The ultrasonic motor has a simple structure and a quick response properties. These characteristics of the ultrasonic are suitable to apply the X-Y Table. The electrode pattern of ultrasonic motor fabricated has been used the L1-B4 vibration mode. The piezoelectric ceramic was composed of PZ-PT-PMN which was shown the high electromechanical stability under high vibration level. As the experimental results, we could fabricate the rectangular plate-type linear ultrasonic motor which showed 100 mm/s in maximum speed and 60 gf in maximum trust, and this ultrasonic motor may be applicable to X-Y Table.