Smart microchips for intelligent sensing

Author

Ishida, M. ; Kawano, T. ; Sawada, K.

Author_Institution

Dept. of Electr. & Electron. Inf. Eng., Toyohashi Univ. of Technol., Toyohashi, Japan

fYear

2010

fDate

15-18 June 2010

Firstpage

1

Lastpage

5

Abstract

Silicon smart microchips with CMOS/MEMS technology are realized for Intelligent sensing. In our developed chips, new type sensor chips for bio-medical applications are presented especially here. One is Si microprobe electrode and tube array chips for recording of neurons in the tissue and drug deliver use. The probe array can be fabricated on IC chip, using standard IC process followed by a selective Si probe growth. Another one is pH image sensors successfully fabricated by using the CCD/CMOS image sensor technique, and real time imaging of a chemical reaction and pH distribution was carried out.

Keywords

CCD image sensors; CMOS image sensors; biological tissues; biosensors; drug delivery systems; elemental semiconductors; intelligent sensors; microelectrodes; microsensors; silicon; CCD-CMOS image sensor; CMOS technology; IC chip; MEMS technology; Si microprobe electrode; biomedical application; drug delivery; intelligent sensing; neuron recording; pH image sensor; silicon smart microchip; tissue; tube array chip; Biomedical imaging; CMOS integrated circuits; Micromechanical devices; Mirrors; Noise; Sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Networked Sensing Systems (INSS), 2010 Seventh International Conference on

Conference_Location

Kassel

Print_ISBN

978-1-4244-7911-5

Electronic_ISBN

978-1-4244-7910-8

Type

conf

DOI

10.1109/INSS.2010.5573327

Filename

5573327