Title :
Recent Advances in Three Dimensional Microfabrications by Two-Photon Lithography
Author :
Park, Jinsoon ; Yang, Byeongil ; Kim, Ran Hee ; Cho, Namchul ; Lee, Kwang-Sup
Author_Institution :
Hannam Univ., Daejeon
Abstract :
In this presentation, the development through molecular engineering of highly efficient TPA materials that can be used for 3D microfabrications in the near infrared (NIR) regime, and also the development of various methods for improving the precision and efficiency of 3D microfabrications are reported.
Keywords :
micro-optics; optical fabrication; photolithography; two-photon processes; molecular engineering; near infrared regime; three dimensional microfabrication; two-photon lithography; Absorption; Chemicals; Fabrication; Laser beams; Lithography; Mass production; Microstructure; Optical materials; Polymers; Resins;
Conference_Titel :
Lasers and Electro-Optics Society, 2007. LEOS 2007. The 20th Annual Meeting of the IEEE
Conference_Location :
Lake Buena Vista, FL
Print_ISBN :
978-1-4244-0925-9
Electronic_ISBN :
1092-8081
DOI :
10.1109/LEOS.2007.4382624
