Title :
A high density conduction based micro-DNA-identification array fabricated in a CMOS compatible process
Author :
Mei Xue ; Jiong Li ; Zuhong Lu ; Chuguang Feng ; Zhikuan Zhang ; Ko, P.K. ; Mansun Chan
Author_Institution :
Dept. of Electr. & Electron. Eng., Hong Kong Univ. of Sci. & Technol., China
Abstract :
A high-density CMOS-compatible DNA array fabricated using a modified metalization process is demonstrated. The array produces a conductivity difference of nine orders of magnitude for matched and single-based mismatched DNA molecules, which can be easily detected by a simple sensing circuit.
Keywords :
CMOS integrated circuits; DNA; biosensors; microsensors; CMOS compatible process; DNA molecules; conductivity difference; micro-DNA-identification array; modified metalization process; sensing circuit; single-based matched DNA; single-based mismatched DNA; Biomedical optical imaging; Bridge circuits; CMOS process; DNA; Fabrication; Gold; Metallization; Multiplexing; Probes; Self-assembly;
Conference_Titel :
Solid-State Circuits Conference, 2003. Digest of Technical Papers. ISSCC. 2003 IEEE International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-7707-9
DOI :
10.1109/ISSCC.2003.1234265
