• DocumentCode
    2105848
  • Title

    Electrothermal Wrinkling of Silicon Nitride Membrane Mirror in a Fabry-Perot Cavity

  • Author

    Chintapatla, Shravan ; Muth, John F.

  • Author_Institution
    North Carolina State Univ., Raleigh
  • fYear
    2007
  • fDate
    21-25 Oct. 2007
  • Firstpage
    767
  • Lastpage
    768
  • Abstract
    A micromachined electrothermally tuned Fabry-Perot filter with good optical contrast was fabricated using SiNx membranes. The finesse of the cavity can be controlled by electrothermally wrinkling the mirrors.
  • Keywords
    Fabry-Perot resonators; micro-optomechanical devices; micromachining; mirrors; optical filters; silicon compounds; Fabry-Perot cavity; Fabry-Perot filter; SiNx; electrothermal wrinkling; micromachined electrothermally tuned filter; optical contrast; silicon nitride membrane mirror; Biomembranes; Bridges; Electrothermal effects; Fabry-Perot; Mirrors; Optical filters; Optical resonators; Optical sensors; Resonance; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Society, 2007. LEOS 2007. The 20th Annual Meeting of the IEEE
  • Conference_Location
    Lake Buena Vista, FL
  • ISSN
    1092-8081
  • Print_ISBN
    978-1-4244-0925-9
  • Electronic_ISBN
    1092-8081
  • Type

    conf

  • DOI
    10.1109/LEOS.2007.4382633
  • Filename
    4382633
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2105848