DocumentCode :
2105848
Title :
Electrothermal Wrinkling of Silicon Nitride Membrane Mirror in a Fabry-Perot Cavity
Author :
Chintapatla, Shravan ; Muth, John F.
Author_Institution :
North Carolina State Univ., Raleigh
fYear :
2007
fDate :
21-25 Oct. 2007
Firstpage :
767
Lastpage :
768
Abstract :
A micromachined electrothermally tuned Fabry-Perot filter with good optical contrast was fabricated using SiNx membranes. The finesse of the cavity can be controlled by electrothermally wrinkling the mirrors.
Keywords :
Fabry-Perot resonators; micro-optomechanical devices; micromachining; mirrors; optical filters; silicon compounds; Fabry-Perot cavity; Fabry-Perot filter; SiNx; electrothermal wrinkling; micromachined electrothermally tuned filter; optical contrast; silicon nitride membrane mirror; Biomembranes; Bridges; Electrothermal effects; Fabry-Perot; Mirrors; Optical filters; Optical resonators; Optical sensors; Resonance; Silicon;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics Society, 2007. LEOS 2007. The 20th Annual Meeting of the IEEE
Conference_Location :
Lake Buena Vista, FL
ISSN :
1092-8081
Print_ISBN :
978-1-4244-0925-9
Electronic_ISBN :
1092-8081
Type :
conf
DOI :
10.1109/LEOS.2007.4382633
Filename :
4382633
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2105848
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