Title :
Integrated multiple-device IMU system with continuous-time sensing circuitry
Author :
Hao Luo ; Fedder, G. ; Carley, L.R.
Author_Institution :
Dept. of Electr. & Comput. Eng., Carnegie Mellon Univ., Pittsburgh, PA, USA
Abstract :
This multiple IMU system integrates lateral accelerometers and vertical gyroscopes with signal processing circuits in a post CMOS MEMS process. A direct-coupled continuous-time sensing buffer for MEMS capacitive sensing has a -3dB frequency corner lower than 10Hz. The integration of multiple sensors makes cross-device compensation possible.
Keywords :
CMOS integrated circuits; accelerometers; capacitive sensors; gyroscopes; microsensors; sensor fusion; 10 Hz; CMOS MEMS capacitive sensor; cross-device compensation; direct-coupled continuous-time sensing buffer; inertial measurement unit; integrated multiple-device IMU system; lateral accelerometer; signal processing circuit; vertical gyroscope; Acceleration; Accelerometers; CMOS process; CMOS technology; Circuits; Frequency; Gyroscopes; Micromechanical devices; Parasitic capacitance; Preamplifiers;
Conference_Titel :
Solid-State Circuits Conference, 2003. Digest of Technical Papers. ISSCC. 2003 IEEE International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-7707-9
DOI :
10.1109/ISSCC.2003.1234268
