Title :
An all-optical actuation and detection scheme for studying dissipation and materials properties of NEMS resonators
Author :
Verbridge, Scott S. ; Shapiro, Daniel Finkelstein ; Bunch, J. Scott ; van der Zande, A.M. ; McEuen, Paul L. ; Parpia, Jeevak M. ; Craighead, Harold G.
Author_Institution :
Cornell Univ., Ithaca
Abstract :
The miniaturization of mechanical resonators continues to be of interest due to the basic physical insights into mechanical behavior at the nanoscale that can be provided, as well as the practical uses in sensing and signal processing to which such devices can be put. Some of the remaining open issues in this field pertain to the ultimate mass sensitivity of these structures, motivating the work presented in this paper. Specifically, we are interested in the factors that determine the dissipation, or quality factor, and the factors that limit the miniaturization that can be achieved with these structures.
Keywords :
Q-factor; absorbing media; actuators; beams (structures); light interferometry; measurement by laser beam; micro-optomechanical devices; micromechanical resonators; nanotechnology; silicon compounds; stress analysis; tensile testing; NEMS resonators; SiN; all-optical actuation; all-optical detection scheme; amplitude-modulated driving laser; continuous wave detection laser; dissipation properties; doubly-clamped silicon nitride devices; interferometry; materials properties; mechanical resonators miniaturization; nanomechanical beams resonance; quality factor; ultimate mass sensitivity; Compressive stress; Frequency; Material properties; Nanoelectromechanical systems; Nanoscale devices; Physics; Q factor; Resonance; Silicon; Tensile stress;
Conference_Titel :
Lasers and Electro-Optics Society, 2007. LEOS 2007. The 20th Annual Meeting of the IEEE
Conference_Location :
Lake Buena Vista, FL
Print_ISBN :
978-1-4244-0925-9
Electronic_ISBN :
1092-8081
DOI :
10.1109/LEOS.2007.4382669