Title : 
Ultraviolet Stimulated Emission with a Low Lasing Threshold from ZnO Thin Films grown by Atomic Layer Deposition
         
        
            Author : 
Chen, M.J. ; Chen, H.C. ; Wu, M.K. ; Cheng, Y.C. ; Tsai, F.Y.
         
        
            Author_Institution : 
Nat. Taiwan Univ., Taipei
         
        
        
        
        
        
            Abstract : 
ZnO thin films were grown on sapphire substrates by atomic layer deposition (ALD) followed with high-temperature post-annealing. A low threshold for the onset of stimulated emission was observed at excitation intensity of 49.2 kW/cm2.
         
        
            Keywords : 
II-VI semiconductors; annealing; atomic layer deposition; semiconductor thin films; stimulated emission; zinc compounds; Al2O3; ZnO; atomic layer deposition; high-temperature post-annealing; low lasing threshold; sapphire substrates; thin film growth; ultraviolet stimulated emission; Atomic layer deposition; Chemical vapor deposition; Crystallization; Laser excitation; Materials science and technology; Molecular beam epitaxial growth; Sputtering; Stimulated emission; Substrates; Zinc oxide;
         
        
        
        
            Conference_Titel : 
Lasers and Electro-Optics Society, 2007. LEOS 2007. The 20th Annual Meeting of the IEEE
         
        
            Conference_Location : 
Lake Buena Vista, FL
         
        
        
            Print_ISBN : 
978-1-4244-0925-9
         
        
            Electronic_ISBN : 
1092-8081
         
        
        
            DOI : 
10.1109/LEOS.2007.4382703