Title :
An Electrothermal Micromirror with High Linear Scanning Efficiency
Author :
Pal, Sagnik ; Jia, Kemiao ; Xie, Huikai
Author_Institution :
Univ. of Florida, Gainesville
Abstract :
An electrothermal micromirror with an aperture size of 1 mm times 1.2 mm has been developed. The mirror can tilt as much as 21deg with a 15 V DC voltage. High linear scanning efficiency is obtained by using a special drive voltage waveform. The waveform is characterized by two parameters which are determined experimentally.
Keywords :
micromirrors; electrothermal micromirror; linear scanning efficiency; size 1 mm; size 1.2 mm; voltage 15 V; voltage waveform; Actuators; Biomedical optical imaging; Electrothermal effects; Frequency; Micromechanical devices; Micromirrors; Mirrors; Nonlinear optics; Optical interferometry; Voltage; Electrothermal actuation; Linear scanning; MEMS; Micromirrors; Optical imaging;
Conference_Titel :
Lasers and Electro-Optics Society, 2007. LEOS 2007. The 20th Annual Meeting of the IEEE
Conference_Location :
Lake Buena Vista, FL
Print_ISBN :
978-1-4244-0925-9
Electronic_ISBN :
1092-8081
DOI :
10.1109/LEOS.2007.4382707
