DocumentCode :
2107687
Title :
Beam steering system using a 2D MEMS scanner
Author :
Pétremand, Yves ; Epitaux, Marc ; Hauffe, Ralf ; Noell, Wilfried ; De Rooij, Nico F.
Author_Institution :
IMT, University of Neuchâtel, Rue Jaquet-Droz 1, 2000 Neuchâtel, Switzerland, phone +41327205153, fax +41327205711, yves.petremand@unine.ch
fYear :
2007
fDate :
21-25 Oct. 2007
Firstpage :
916
Lastpage :
917
Keywords :
Assembly systems; Beam steering; Diode lasers; Lenses; Microelectromechanical devices; Micromechanical devices; Optical beams; Optical coupling; Optical fiber devices; Optical fibers; Beam Steering; Deep Reactive Ion Etching; Electrostatic Comb Drive; Laser to Fiber Coupling; Optical MEMS;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics Society, 2007. LEOS 2007. The 20th Annual Meeting of the IEEE
Conference_Location :
Lake Buena Vista, FL, USA
ISSN :
1092-8081
Print_ISBN :
978-1-4244-0925-9
Electronic_ISBN :
1092-8081
Type :
conf
DOI :
10.1109/LEOS.2007.4382708
Filename :
4382708
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2107687
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