Title :
Design and optimization of micromachined flexible joints
Author :
Fettig, H. ; Hubbard, T. ; Kujath, M.
Author_Institution :
Mech. Eng. Dept., Dalhousie Univ., Halifax, NS, Canada
Abstract :
This paper examines the design and optimization of surface micromachined flexible joints. The joints consist of slender beams that are formed in a variety of shapes: “I”, “H” and “X” shaped joints are considered. FEM simulations are used to examine these joints to determine the optimum design for a range of requirements: directional stiffnesses, range of motion and resonant frequency of a joint-mass system. The simulation results are compared to a series of tests of surface micromachined polysilicon micro-joints. The resonant frequencies of the joint-mass systems were measured using a non-contact laser reflectance setup
Keywords :
artificial limbs; digital simulation; finite element analysis; frequency measurement; micromachining; optimisation; resonance; FEM simulations; H shaped joints; I shaped joints; X shaped joints; directional stiffnesses; joint-mass system; micromachined flexible joints design; micromachined flexible joints optimization; motion range; noncontact laser reflectance setup; optimum design; resonant frequency measurement; simulation results; slender beams; surface micromachined polysilicon micro-joints; Arm; Design optimization; Fabrication; Frequency measurement; Friction; Mechanical engineering; Micromachining; Resonant frequency; Shape; Testing;
Conference_Titel :
Electrical and Computer Engineering, 2000 Canadian Conference on
Conference_Location :
Halifax, NS
Print_ISBN :
0-7803-5957-7
DOI :
10.1109/CCECE.2000.849607
