Title :
Low-noise monolithic oscillator with an integrated three-dimensional inductor
Author :
Van Schuylenbergh, K. ; Griffiths, B. ; Chua, C.L. ; Fork, D.K. ; Jeng-Ping Lu
Author_Institution :
PARC, Palo Alto, CA, USA
Abstract :
A balanced silicon BiCMOS oscillator using self-assembled curled circular spring 3D inductor with peak Q of 40 reduces phase noise by 12.3dB at 100kHz offset compared to conventional planar spiral inductor approach. The addition of a 5/spl mu/m copper underlayer raises Q to 85.
Keywords :
BiCMOS integrated circuits; Q-factor; inductors; integrated circuit noise; oscillators; phase noise; self-assembly; Cu; Q-factor; balanced silicon BiCMOS oscillator; copper underlayer; integrated three-dimensional inductor; low-noise monolithic oscillator; phase noise; self-assembled curled circular spring 3D inductor; Active inductors; Atomic layer deposition; Circuit testing; Coils; Mobile communication; Q factor; Radio frequency; Springs; Substrates; Voltage-controlled oscillators;
Conference_Titel :
Solid-State Circuits Conference, 2003. Digest of Technical Papers. ISSCC. 2003 IEEE International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-7707-9
DOI :
10.1109/ISSCC.2003.1234351
