A fully integrated distributed frequency tripler for broadband harmonic generation in submillimeter wave applications

A fully integrated distributed frequency tripler, periodically loaded with HBVs (heterostructure barrier varactors), has been designed to produce a broad range of output frequencies up to 600 GHz. This paper concentrated on both the design and the techniques used in realizing the frequency tripler. Key to the design are the use of low loss SU-8 membranes incorporating integrated novel HBV devices, with the fabrication approach to produce a high capacitance-voltage ratio whilst minimising the device series resistance. The entire concept of this work is to design a cost effective fully integrated package with the frequency tripler circuit accommodated in a micromachined waveguide for broadband harmonic generation up to Terahertz frequencies.