مرکز منطقه ای اطلاع رساني علوم و فناوري - Numerical Algorithms For Precise Calculation Of Surface Movement In 3-D Topography Simulation

DocumentCode :

2110070

Title :

Numerical Algorithms For Precise Calculation Of Surface Movement In 3-D Topography Simulation

Author :

Leon, F.A. ; Tazawa, S. ; Saito, K. ; Yoshii, A. ; Scharfetter, D.L.

Author_Institution :

Intel Corporation

fYear :

1993

fDate :

14-15 May 1993

Firstpage :

Lastpage :

Keywords :

Equations; Laboratories; Large scale integration; Oxidation; Solids; Sputter etching; Surface topography; Surface treatment; Testing; Topology;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

VLSI Process and Device Modeling, 1993. (1993 VPAD) 1993 International Workshop on

Print_ISBN :

0-7803-1338-0

Type :

conf

DOI :

10.1109/VPAD.1993.724722

Filename :

724722

Link To Document :