Title :
Properties of Pt/Cr layers due to fabrication conditions and micro hot-plate thermal characteristics [gas sensors]
Author :
Yi, Seung Hwan ; Suh, I.C. ; Jin, H.S. ; Kim, B.W. ; Sung, Y.K.
Author_Institution :
MANDO R&D Centre, Kyong, South Korea
Abstract :
We studied the electrical and structural properties of Pt/Cr layers to fabricate the micro hot-plate for the first time. Increasing the Cr layer thickness, the sheet resistance decreased greatly. The Pt/Cr layer sheet resistance is not affected by the Cr layer thickness. When we annealed the Pt/Cr layer in Ar ambient varying the temperature from 500°C to 700°C, the sheet resistance varied from 2.026 Ω/□ to 0.6317 Ω/□. We analyzed the Pt/Cr layer properties according to the annealing conditions by XRD and AES depth profiles. We fabricated the micro hot-plate using the Pt/Cr layer by micromachining technology and measured the thermal characteristics by an IR thermo-vision system. The micro-hot plate was simulated by FIDAP and its results compared for the first time
Keywords :
Auger effect; X-ray diffraction; annealing; chromium; electric heating; electrical resistivity; gas sensors; infrared imaging; metallic thin films; micromachining; microsensors; platinum; temperature distribution; 500 to 700 degC; AES depth profiles; Ar ambient; Cr layer thickness; IR thermo-vision system; Pt-Cr; Pt/Cr layers; Si; XRD; annealing; electrical properties; fabrication conditions; micro hot-plate thermal characteristics; micromachining technology; sheet resistance; solid state gas sensors; structural properties; Biomembranes; Chromium; Conducting materials; Electrical resistance measurement; Etching; Fabrication; Thermal conductivity; Thermal stresses; Thickness measurement; X-ray scattering;
Conference_Titel :
Semiconductor Conference, 1996., International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-3223-7
DOI :
10.1109/SMICND.1996.557357
