Title :
A Simulation Strategy For Process Optimization
Author :
De Meyer, Kristin M. ; Cartuyvels, Rudi ; Dupas, Luc
Author_Institution :
IMEC
Keywords :
CMOS process; Circuit simulation; Fluctuations; Input variables; Process design; Response surface methodology; Robustness; Software performance; US Department of Energy; Ultra large scale integration;
Conference_Titel :
VLSI Process and Device Modeling, 1993. (1993 VPAD) 1993 International Workshop on
Print_ISBN :
0-7803-1338-0
DOI :
10.1109/VPAD.1993.724730
