DocumentCode :
2112588
Title :
Efficient Mmtidbiensional Sbiulation Of Ion Iwlantation Into Multilayer Structures
Author :
Lorenz, J. ; Wierzbicki, R.J.
Author_Institution :
Fraunhofer-Arbeitsgruppe fuer Integrierte Schaltungen
fYear :
1993
fDate :
14-15 May 1993
Firstpage :
84
Lastpage :
85
Keywords :
Adaptive control; Analytical models; Boron; Error correction; Interpolation; Ion implantation; Mesh generation; Nonhomogeneous media; Programmable control; Surface topography;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
VLSI Process and Device Modeling, 1993. (1993 VPAD) 1993 International Workshop on
Print_ISBN :
0-7803-1338-0
Type :
conf
DOI :
10.1109/VPAD.1993.724731
Filename :
724731
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2112588
بازگشت