DocumentCode
2112646
Title
Impact of layout on the performance of photodiodes in 0.18µm CMOS SOI
Author
Xuebei Yang ; Xuyang Lu ; Babakhani, A.
Author_Institution
Electr. & Comput. Eng. Dept., Rice Univ., Houston, TX, USA
fYear
2013
fDate
8-12 Sept. 2013
Firstpage
586
Lastpage
587
Abstract
The impact of layout on the responsivity and bandwidth of photodiodes is studied and summarized. The photodiodes are fabricated in a 0.18μm CMOS SOI process technology. The measurements are performed at wavelengths near 850nm.
Keywords
CMOS integrated circuits; integrated circuit layout; integrated optoelectronics; photodiodes; silicon-on-insulator; CMOS SOI; layout impact; photodiode performance; silicon-on-insulator; size 0.18 mum; Bandwidth; CMOS integrated circuits; CMOS technology; Fingers; Layout; Metals; Photodiodes;
fLanguage
English
Publisher
ieee
Conference_Titel
Photonics Conference (IPC), 2013 IEEE
Conference_Location
Bellevue, WA
Print_ISBN
978-1-4577-1506-8
Type
conf
DOI
10.1109/IPCon.2013.6656430
Filename
6656430
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