Title :
Verification Of The Viscoelastic Oxidation Model Using Simple Test Structures
Author :
Uchida, T. ; Kotani, N. ; Tsubouchi, N.
Author_Institution :
Mitsubishi Electric Corporation
Keywords :
Capacitive sensors; Elasticity; Oxidation; Shape; Stress measurement; Substrates; Temperature; Testing; Thermal stresses; Viscosity;
Conference_Titel :
VLSI Process and Device Modeling, 1993. (1993 VPAD) 1993 International Workshop on
Print_ISBN :
0-7803-1338-0
DOI :
10.1109/VPAD.1993.724733
