• DocumentCode
    2113396
  • Title

    Defect-free fabrication of periodic structures using extreme ultraviolet Talbot lithography

  • Author

    Li, Wenyuan ; Martinez-Esquiroz, V. ; Urbanski, L. ; Patel, Dinesh ; Menoni, C.S. ; Marconi, Mario ; Stein, Aaron

  • Author_Institution
    Electr. & Comput. Eng. Dept., Colorado State Univ., Fort Collins, CO, USA
  • fYear
    2013
  • fDate
    8-12 Sept. 2013
  • Firstpage
    635
  • Lastpage
    636
  • Abstract
    We present a defect-free scalable nano-patterning scheme based on the Talbot effect with extreme ultraviolet laser illumination.
  • Keywords
    Talbot effect; nanofabrication; nanolithography; nanopatterning; periodic structures; photoresists; ultraviolet lithography; Talbot effect; defect-free fabrication; defect-free scalable nanopatterning; extreme ultraviolet Talbot lithography; extreme ultraviolet laser illumination; periodic structures; Diffraction; Fabrication; Lithography; Resists; Talbot effect; Tiles; Ultraviolet sources;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Photonics Conference (IPC), 2013 IEEE
  • Conference_Location
    Bellevue, WA
  • Print_ISBN
    978-1-4577-1506-8
  • Type

    conf

  • DOI
    10.1109/IPCon.2013.6656455
  • Filename
    6656455
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2113396