Title :
Shear Horizontal Surface Acoustic Wave Sensors Based on Polyaniline for Ammonia Gas Sensing
Author :
Shen, Chi-Yen ; Hsu, Cheng-Liang ; Wang, De-Lu
Author_Institution :
Dept. of Electr. Eng., I-Shou Univ., Kaohsiung County
Abstract :
A shear horizontal surface acoustic wave (SH-SAW) sensor coated with polyaniline (PANI) was investigated in this study. The frequency shift of SH-SAW was measured for the response to ammonia in this study. The temperature effect was also discussed in order to find the suitable temperature of operation. The response of the SH-SAW sensor immediately responded the concentration of ammonia gas. Moreover, this sensor presented a sensitivity of 0.03 ppm/ppm at 23degC. The responses to ammonia decreased with decreasing temperature below 23degC
Keywords :
air pollution measurement; ammonia; chemical variables measurement; gas sensors; organic compounds; surface acoustic wave sensors; NH3; PANI; SH-SAW sensor; ammonia gas concentration; ammonia gas sensing; chemical sensor; gas sensor; organic compound; polyaniline; shear horizontal surface acoustic wave sensors; Acoustic sensors; Acoustic waves; Conductive films; Frequency measurement; Gas detectors; Optical resonators; Polymer films; Sensor phenomena and characterization; Surface acoustic waves; Temperature sensors;
Conference_Titel :
Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems, 2006. EuroSime 2006. 7th International Conference on
Conference_Location :
Como
Print_ISBN :
1-4244-0275-1
DOI :
10.1109/ESIME.2006.1643945
