Title :
Advanced sensor development by MNX
Author :
Binger, David ; Ozgur, Mehmet ; Pedersen, Michael ; Sunal, Paul ; Oh, Lance ; Masse, Roger ; Short, Thomas ; Brown, Joseph ; Huff, Michael
Author_Institution :
MEMS & Nanotechnol. Exchange Corp. for Nat. Res. Initiatives, Reston, VA, USA
Abstract :
The MEMS and Nanotechnology Exchange (MNX) was established in 1999 with support from the Defense Advanced Research Projects Agency (DARPA) as an implementation service for the United States R&D community. The overriding goal of the MNX is to provide maximum design and fabrication freedom, which is extremely important for enabling high performance and innovation in the development of MEMS sensors. This paper will provide an overview of the MNX operation and review some of the advanced fabrication technologies made available by the MNX for the implementation of advanced MEMS sensors.
Keywords :
microsensors; MEMS and Nanotechnology Exchange; MEMS sensors; MNX; advanced fabrication technologies; advanced sensor development;
Conference_Titel :
Sensors, 2010 IEEE
Conference_Location :
Kona, HI
Print_ISBN :
978-1-4244-8170-5
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2010.5689873
