• DocumentCode
    2113904
  • Title

    Computational Evaluation Of Three-dimensional Topography Process Simulation Components

  • Author

    Wang, R.H. ; Karasick, M.S. ; Neureuther, AR

  • Author_Institution
    University of California
  • fYear
    1993
  • fDate
    14-15 May 1993
  • Firstpage
    94
  • Lastpage
    95
  • Keywords
    Computational modeling; Computer interfaces; Deformable models; Engines; Geometry; Robustness; Semiconductor device modeling; Solid modeling; Surface topography; Testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    VLSI Process and Device Modeling, 1993. (1993 VPAD) 1993 International Workshop on
  • Print_ISBN
    0-7803-1338-0
  • Type

    conf

  • DOI
    10.1109/VPAD.1993.724736
  • Filename
    724736
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2113904