Title :
Computational Evaluation Of Three-dimensional Topography Process Simulation Components
Author :
Wang, R.H. ; Karasick, M.S. ; Neureuther, AR
Author_Institution :
University of California
Keywords :
Computational modeling; Computer interfaces; Deformable models; Engines; Geometry; Robustness; Semiconductor device modeling; Solid modeling; Surface topography; Testing;
Conference_Titel :
VLSI Process and Device Modeling, 1993. (1993 VPAD) 1993 International Workshop on
Print_ISBN :
0-7803-1338-0
DOI :
10.1109/VPAD.1993.724736
