Title :
A MEMS nanopositioner with thermal actuator and on-chip thermal sensor
Author :
Zhu, Y. ; Moheimani, S.O.R. ; Yuce, M.R.
Author_Institution :
Sch. of Electr. Eng. & Comput. Sci., Univ. of Newcastle Univ. Drive, Newcastle, NSW, Australia
Abstract :
This paper describes the design of a micromachined nanopositioner with electrothermal actuation and sensing capabilities in a single silicon chip. The positioner has a dynamic range of 14.4 μm with a differential sensing scheme. At 6-V dc bias voltage, the position sensors have a power consumption of 120 mW, and a sensitivity of 0.27 mV/nm. The open-loop bandwidth is 101 Hz and the phase delay from 1 Hz to 51.2 kHz is 169°. The on-chip displacement sensing enables a feedback control capability.
Keywords :
elemental semiconductors; microactuators; micromachining; microsensors; nanosensors; silicon; DC bias voltage; MEMS nanopositioner; Si; bandwidth 101 Hz; differential sensing scheme; electrothermal actuation; feedback control capability; frequency 1 Hz to 51.2 kHz; micromachined nanopositioner; on-chip displacement sensing; on-chip thermal sensor; open-loop bandwidth; phase delay; position sensors; power 120 mW; power consumption; single silicon chip; size 14.4 mum; thermal actuator; voltage 6 V;
Conference_Titel :
Sensors, 2010 IEEE
Conference_Location :
Kona, HI
Print_ISBN :
978-1-4244-8170-5
Electronic_ISBN :
1930-0395
DOI :
10.1109/ICSENS.2010.5689877
